Sr. Equipment Engineer, Chemical Mechanical Planarization

We are building Terafab, a vertically integrated semiconductor factory at an unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot. In this critical role, you will be responsible for the installation, qualification, optimization, reconfiguration and maintenance of state-of-the-art Chemical Mechanical Planarization (CMP) tools. Your work will directly impact the yield and performance of Tesla s custom semiconductor chips, which are essential for our AI, Autopilot, and powertrain systems. You will bridge the gap between equipment hardware and process requirements to achieve the extreme throughput and uniformity targets of the Terafab facility. This is a highly hands-on role at one of the most ambitious fab programs in the world.

• Lead the installation, calibration, and acceptance testing (IQ/OQ/PQ) of new and upgraded CMP tools (e.g., Applied Materials, Ebara, AMAT)
• Develop and execute equipment qualification plans to ensure tools meet Terafab's rigorous specifications for planarity, defectivity, and throughput
• Collaborate with tool vendors to resolve technical challenges during ramp-up
• Lead root cause analysis (RCA) for equipment failures, utilizing methodologies such as 8D or Fishbone diagrams

Partner closely with Process Integration, Metrology, and Yield Engineering teams to align equipment capabilities with process windows

Support the development of new CMP recipes for advanced node technologies (e.g., 4nm, 3nm, or custom Tesla nodes)

Ensure all equipment operations comply with Tesla's strict safety standards and environmental regulations regarding chemical handling and waste disposal

Lead safety audits and implement corrective actions for equipment-related hazards

• Degree in Electrical Engineering, Mechanical Engineering, Materials Science, Chemical Engineering, or equivalent experience

• Minimum of 3-5 years of experience in semiconductor manufacturing, specifically with CMP equipment (e.g., Applied Materials Endura, Ebara Polaris, or similar)

• Deep understanding of CMP physics, slurry chemistry, pad conditioning, and metrology

• Proficiency with data analysis tools (Python, JMP, Minitab) and statistical process control (SPC)

• Familiarity with SEMI standards and equipment communication protocols (SECS/GEM)

Benefits

Along with competitive pay, as a full-time Tesla employee, you are eligible for the following benefits at day 1 of hire:

• Medical plans > plan options with $0 payroll deduction
• Family-building, fertility, adoption and surrogacy benefits
• Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution
• Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA
• Healthcare and Dependent Care Flexible Spending Accounts (FSA)
• 401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits
• Company paid Basic Life, AD&D
• Short-term and long-term disability insurance (90 day waiting period)
• Employee Assistance Program
• Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays
• Back-up childcare and parenting support resources
• Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance
• Weight Loss and Tobacco Cessation Programs
• Tesla Babies program
• Commuter benefits
• Employee discounts and perks program