Lithography-Process-Lead-Engineer%2C-FAB%2C-IME

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Job Description

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Job Title: Lithography Process Lead Engineer, FAB, IME

Requisition ID: 2305

Posting Start Date: 12/05/2026

Job Description

We are seeking an experienced Lithography Process Engineer to support day-to-day lithography operations in a research institute cleanroom facility focused on translational research and industry collaboration.This role emphasizes stable tool operation, process control, and customer execution rather than process technology development. The successful candidate will work closely with industry partners, integration teams, and fab operations to ensure high tool availability, repeatable performance, and rapid learning-cycle execution.The engineer will support both dry and immersion lithography platforms in a multi-product, multi-node R&D environment.

Key Responsibilities

Lithography Operations & Process Support

• Own daily operation of dry and immersion lithography tools, ensuring high uptime, process stability, and manufacturability
• Execute production and customer wafers according to agreed process flows, specifications, and schedules
• Monitor critical lithography metrics such as CD, overlay, focus, dose, defectivity, and tool matchingPerform routine process setup, qualification, calibration, and release for supported layers
• Support tool-to-tool matching and baseline control across lithography platforms

Process Control & Yield Support

• Implement and maintain SPC, FDC, and run-to-run control strategies for lithography
• Conduct root-cause analysis for excursion events (CD, overlay, focus, defectivity) and drive corrective actions
• Support yield monitoring and continuous improvement activities in collaboration with device and integration teams
• Drive process robustness to support frequent product changes typical of a translational R&D fab

Tool and Interface Management

• Work closely with equipment engineers and vendors on preventive maintenance, troubleshooting, and tool recovery
• Support tool acceptance, re-qualification, and post-maintenance checks
• Interface with resist track systems, metrology tools (CD-SEM, overlay, focus), and downstream processes

Industry & Research Partner Support

• Serve as a technical point of contact for lithography-related operational topics with industry partners
• Support joint development projects by ensuring repeatable, well-controlled lithography execution
• Prepare operation-focused reports (process stability, excursions, lessons learned) for stakeholders

Documentation, Safety & Compliance

• Maintain accurate process documentation, SOPs, and best-known methods (BKMs)
• Ensure compliance with cleanroom safety, chemical handling, and operational discipline
• Contribute to continuous improvement of fab operational practices

Job Requirements

Education

• Bachelors or Masters degree in Electrical Engineering, Materials Science, Physics, Chemical Engineering, or a related discipline

Experience

• 710 years of hands-on lithography experience in semiconductor manufacturing or advanced R&D fabs
• Proven experience supporting both dry and immersion lithography in an operational environment
• Background in logic, memory, or advanced-node R&D/manufacturing is preferred

Technical Skills

• Strong understanding of: Photoresist processes (coat, bake, expose, develop), Optical lithography fundamentals (focus, dose, NA, overlay, CD control), Immersion-specific challenges (defects, bubbles, watermarking, topcoat interactions)
• Hands-on experience with: Lithography exposure tools and resist tracks, SPC, FDC, process qualification, and tool matching, CD-SEM, overlay metrology, and defect inspection tools
• Familiarity with multi-product fab operations and fast turn-around requirements

Soft Skills & Attributes

• Strong execution and operations mindset
• Able to work effectively in cross-functional, multi-stakeholder environments
• Comfortable supporting industry-facing projects with high visibility and clear deliverables
• Good problem-solving, documentation, and communication skills
• Able to thrive in a dynamic R&D fab with frequent priority shifts

Preferred / Advantageous Experience

• Experience working in research institutes or pilot fabs
• Exposure to advanced lithography nodes or patterning complexity (tight overlay/CD budgets)
• Familiarity with collaborative projects involving multiple companies
• Knowledge of EHS practices related to photoresists and solvents

Apply now

The above eligibility criteria are not exhaustive. A*STAR may include additional selection criteria based on its prevailing recruitment policies. These policies may be amended from time to time without notice. We regret that only shortlisted candidates will be notified.

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